Article (Scientific journals)
A high-performance accelerometer with a fifth-order sigma--delta modulator
Dong, Yufeng; Kraft, Michaël; Gollasch, Carsten O. et al.
2005In Journal of Micromechanics and Microengineering, 15 (7), p. 22-S29
Peer Reviewed verified by ORBi
 

Files


Full Text
JMM high perf acc 2005.pdf
Publisher postprint (1.61 MB)
Request a copy

All documents in ORBi are protected by a user license.

Send to



Details



Abstract :
[en] To verify the effectiveness of a higher order electromechanical sigma–delta modulator (SD M), a micromachined accelerometer is fabricated. The in-plane sensor with fully differential structure has a mechanical noise floor below 1 µgHz^−1/2, static sensitivity 16 pF g^−1 and resonant frequency 325 Hz. FEM analyses are performed to verify these key parameters. The silicon-on-glass sensor is fabricated by deep reactive ion etching (DRIE) and anodic bonding. Compared with a second-order electromechanical SDM, which only uses the sensing element as a loop filter, here it is cascaded with additional electronic integrators to form a fifth-order electromechanical SD M, which leads to better signal to quantization noise ratio (SQNR). This novel approach is analysed and system level simulations are presented. A printed circuit board (PCB) prototype of this high-order SD M loop was built and tested. The experimental data agree well with the simulation results.
Disciplines :
Electrical & electronics engineering
Author, co-author :
Dong, Yufeng
Kraft, Michaël ;  Université de Liège - ULiège > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Systèmes microélectroniques intégrés
Gollasch, Carsten O.
Redman-White, William
Language :
English
Title :
A high-performance accelerometer with a fifth-order sigma--delta modulator
Publication date :
2005
Journal title :
Journal of Micromechanics and Microengineering
ISSN :
0960-1317
Publisher :
Institute of Physics Publishing, United Kingdom
Volume :
15
Issue :
7
Pages :
S22-S29
Peer reviewed :
Peer Reviewed verified by ORBi
Available on ORBi :
since 02 June 2016

Statistics


Number of views
62 (1 by ULiège)
Number of downloads
0 (0 by ULiège)

Scopus citations®
 
72
Scopus citations®
without self-citations
52
OpenCitations
 
57

Bibliography


Similar publications



Contact ORBi