[en] Abstract—This paper reports an acceleration sensing method based on two weakly coupled resonators (WCRs) using the phenomenon of mode localization. When acceleration acts on the proof masses, differential electrostatic stiffness perturbations will be applied to the WCRs, leading to mode localization, and thus, mode shape changes. Therefore, acceleration can be sensed by measuring the amplitude ratio shift. The proposed mode localization with the differential perturbation method leads to a sensitivity enhancement of a factor of 2 than the common single perturbation method. The theoretical model of the sensitivity, bandwidth, and linearity of the accelerometer is established and verified. The measured relative shift in amplitude ratio (∼312162 ppm/g) is 302 times higher than the shift in resonance frequency (∼1035 ppm/g) within the measurement range of ±1g.
The measured resolution based on the amplitude ratio is 0.619 mg and the nonlinearity is ∼3.5% in the open-loop measurement operation.
Disciplines :
Electrical & electronics engineering
Author, co-author :
Zhang, H.M.
Yuan, W.Z.
Li, B.Y.
Hao, Y.C.
Kraft, Michael ; Université de Liège > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Systèmes microélectroniques intégrés
Chang, Honglong
Language :
English
Title :
An acceleration sensing method based on the mode localization of weakly coupled resonators
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Bibliography
H. M. Zhang, W. Z. Yuan, B. Y. Li, Y. C. Hao, M. Kraft, and H. L. Chang, "A novel resonant accelerometer based on mode localization of weakly coupled resonators," in Proc. 18th Int. Conf. Solid-State Sens., Actuators, Microsyst. (TRANSDUCERS), Anchorage, AK, USA, Jun. 2015, pp. 1073-1076.
J. Wu, G. K. Fedder, and L. R. Carley, "A low-noise low-offset capacitive sensing amplifier for a 50-μg/ ¶ Hz monolithic CMOS MEMS accelerometer," IEEE J. Solid-State Circuits, vol. 39, no. 5, pp. 722-730, May 2004.
C. Acar and A. M. Shkel, "Experimental evaluation and comparative analysis of commercial variable-capacitance MEMS accelerometers," J. Micromech. Microeng., vol. 13, no. 5, p. 634, Apr. 2003.
C. Comi, A. Corigliano, G. Langfelder, A. Longoni, A. Tocchio, and B. Simoni, "A resonant microaccelerometer with high sensitivity operating in an oscillating circuit," J. Microelectromech. Syst., vol. 19, no. 5, pp. 1140-1152, Oct. 2010.
Y. Dong, P. Zwahlen, A. M. Nguyen, R. Frosio, and F. Rudolf, "Ultra-high precision MEMS accelerometer," in Proc. 16th IEEE Int. Solid-State Sens., Actuators, Microsyst. Conf. (TRANSDUCERS), Beijing, China, Jun. 2011, pp. 695-698.
M. F. Zaman, A. Sharma, and F. Ayazi, "High performance matchedmode tuning fork gyroscope," in Proc. 19th IEEE Int. Conf. Micro Electro Mech. Syst., Istanbul, Turkey, Jan. 2006, pp. 66-69.
C. Acar and A. M. Shkel, "Inherently robust micromachined gyroscopes with 2-DOF sense-mode oscillator," J. Microelectromech. Syst., vol. 15, no. 2, pp. 380-387, Apr. 2006.
H. Xie and G. K. Fedder, "Fabrication, characterization, and analysis of a DRIE CMOS-MEMS gyroscope," IEEE Sensors J., vol. 3, no. 5, pp. 622-631, Oct. 2003.
N. Yazdi, F. Ayazi, and K. Najafi, "Micromachined inertial sensors," Proc. IEEE, vol. 86, no. 8, pp. 1640-1659, Aug. 1998.
T. A. Roessig, R. T. Howe, A. P. Pisano, and J. H. Smith, "Surfacemicromachined resonant accelerometer," in Proc. Int. Conf. Solid-State Sens. Actuators (TRANSDUCERS), Chicago, IL, USA, Jun. 1997, pp. 859-862.
A. A. Seshia et al., "A vacuum packaged surface micromachined resonant accelerometer," J. Microelectromech. Syst., vol. 11, no. 6, pp. 784-793, Dec. 2002.
M. Aikele et al., "Resonant accelerometer with self-test," Sens. Actuators A, Phys., vol. 92, nos. 1-3, pp. 161-167, Aug. 2001.
S. X. P. Su, H. S. Yang, and A. M. Agogino, "A resonant accelerometer with two-stage microleverage mechanisms fabricated by SOI-MEMS technology," IEEE Sensors J., vol. 5, no. 6, pp. 1214-1223, Dec. 2005.
X. Zou, P. Thiruvenkatanathan, and A. A. Seshia, "A seismic-grade resonant MEMS accelerometer," J. Microelectromech. Syst., vol. 23, no. 4, pp. 768-770, Aug. 2014.
R. E. Hopkins et al., "The silicon oscillating accelerometer: A highperformance MEMS accelerometer for precision navigation and strategic guidance applications," presented at the Inst. Navigat. 61st Annu. Meeting, Cambridge, MA, USA, Jun. 2005.
M. Spletzer, A. Raman, A. Q. Wu, X. Xu, and R. Reifenberger, "Ultrasensitive mass sensing using mode localization in coupled microcantilevers," Appl. Phys. Lett., vol. 88, no. 25, p. 254102, Jun. 2006.
P. Thiruvenkatanathan, J. Yan, J. Woodhouse, A. Aziz, and A. A. Seshia, "Ultrasensitive mode-localized mass sensor with electrically tunable parametric sensitivity," Appl. Phys. Lett., vol. 96, no. 8, p. 081913, Feb. 2010.
C. Pierre, D. M. Tang, and E. H. Dowell, "Localized vibrations of disordered multispan beams - Theory and experiment," Amer. Inst. Aeronautics Astron. J., vol. 25, no. 9, pp. 1249-1257, Sep. 1987.
C. Pierre, "Mode localization and eigenvalue loci veering phenomena in disordered structures," J. Sound Vib., vol. 126, no. 3, pp. 485-502, Nov. 1988.
P. Thiruvenkatanathan and A. A. Seshia, "Mode-localized displacement sensing," J. Microelectromech. Syst., vol. 21, no. 5, pp. 1016-1018, Oct. 2012.
M. Manav, G. Reynen, M. Sharma, E. Cretu, and A. S. Phani, "Ultrasensitive resonant MEMS transducers with tuneable coupling," J. Micromech. Microeng., vol. 24, no. 5, p. 055005, May 2014.
C. Zhao, G. S. Wood, J. Xie, H. Chang, S. H. Pu, and M. Kraft, "A three degree-of-freedom weakly coupled resonator sensor with enhanced stiffness sensitivity," J. Microelectromech. Syst. to be published, doi: 10.1109/JMEMS.2015.2490204.
C. Zhao, G. S. Wood, J. Xie, H. Chang, S. H. Pu, and M. Kraft, "A force sensor based on three weakly coupled resonators with ultrahigh sensitivity," Sens. Actuators A, Phys., vol. 232, pp. 151-162, Aug. 2015.
P. Thiruvenkatanathan, J. Yan, and A. A. Seshia, "Differential amplification of structural perturbations in weakly coupled MEMS resonators," IEEE Trans. Ultrason., Ferroelectr., Freq. Control, vol. 57, no. 3, pp. 690-697, Mar. 2010.
P. Thiruvenkatanathan, J. Yan, J. Woodhouse, and A. A. Seshia, "Enhancing parametric sensitivity in electrically coupled MEMS resonators," J. Microelectromech. Syst., vol. 18, no. 5, pp. 1077-1086, Oct. 2009.
P. Thiruvenkatanathan, J. Woodhouse, J. Yan, and A. A. Seshia, "Limits to mode-localized sensing using micro-and nanomechanical resonator arrays," J. Appl. Phys., vol. 109, no. 10, p. 104903, May 2011.
H. Chang, J. Xie, Q. Fu, Q. Shen, and W. Yuan, "Micromachined inertial measurement unit fabricated by a SOI process with selective roughening under structures," IET Micro Nano Lett., vol. 6, no. 7, pp. 486-489, Jul. 2011.
J. Xie, Y. Hao, Q. Shen, H. Chang, and W. Yuan, "A dicing-free SOI process for MEMS devices based on the lag effect," J. Micromech. Microeng., vol. 23, no. 12, p. 125033, Nov. 2013.
H. Chang, Y. Zhang, J. Xie, Z. Zhou, and W. Yuan, "Integrated behavior simulation and verification for a MEMS vibratory gyroscope using parametric model order reduction," J. Microelectromech. Syst., vol. 19, no. 2, pp. 282-293, Apr. 2010.
Q. Shen, H. Li, Y. Hao, W. Yuan, and H. Chang, "Bias contribution modeling for a symmetrical micromachined coriolis vibratory gyroscope," IEEE Sensors J. to be published, doi: 10.1109/JSEN.2015.2489241.
J. E.-Y. Lee and A. A. Seshia, "Parasitic feedthrough cancellation techniques for enhanced electrical characterization of electrostatic microresonators," Sens. Actuators A, Phys., vol. 156, no. 1, pp. 36-42, Nov. 2009.
H. Zhang, W. Yuan, Y. Hao, and H. Chang, "Influences of the feedthrough capacitance on the frequency synchronization of the weakly coupled resonators," IEEE Sensors J., vol. 15, no. 11, pp. 6081-6088, Nov. 2015.
P. Thiruvenkatanathan, J. Yan, J. Woodhouse, and A. A. Seshia, "Manipulating vibration energy confinement in electrically coupled microelectromechanical resonator arrays," J. Microelectromech. Syst., vol. 20, no. 1, pp. 157-164, Feb. 2011.
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