An acceleration sensing method based on the mode localization of weakly coupled resonators

[en] Abstract—This paper reports an acceleration sensing method based on two weakly coupled resonators (WCRs) using the phenomenon of mode localization. When acceleration acts on the proof masses, differential electrostatic stiffness perturbations will be applied to the WCRs, leading to mode localization, and thus, mode shape changes. Therefore, acceleration can be sensed by measuring the amplitude ratio shift. The proposed mode localization with the differential perturbation method leads to a sensitivity enhancement of a factor of 2 than the common single perturbation method. The theoretical model of the sensitivity, bandwidth, and linearity of the accelerometer is established and veriﬁed. The measured relative shift in amplitude ratio (∼312162 ppm/g) is 302 times higher than the shift in resonance frequency (∼1035 ppm/g) within the measurement range of ±1g. The measured resolution based on the amplitude ratio is 0.619 mg and the nonlinearity is ∼3.5% in the open-loop measurement operation.

Disciplines :

Electrical & electronics engineering

Author, co-author :

Zhang, H.M.

Yuan, W.Z.

Li, B.Y.

Hao, Y.C.

Kraft, Michael ; Université de Liège > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Systèmes microélectroniques intégrés

Chang, Honglong

Language :

English

Title :

An acceleration sensing method based on the mode localization of weakly coupled resonators

Publication date :

2016

Journal title :

Journal of Microelectromechanical Systems

ISSN :

1057-7157

eISSN :

1941-0158

Publisher :

IEEE

Volume :

Issue :

Pages :

286-296

Peer reviewed :

Peer Reviewed verified by ORBi

Available on ORBi :

since 17 May 2016

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Scopus citations^®

149

Scopus citations^®
without self-citations

OpenCitations

108

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