Higher order noise-shaping filters for high-performance micromachined accelerometers

[en] Micromachined inertial sensors that have been incorporated in sigma-delta force-feedback loops have been proven to improve linearity, dynamic range, and bandwidth, and also provide a direct digital output. Previous work mainly focused on using the sensing element only to form a second-order single-loop sigma-delta modulator (SigmaDeltaM); however, the advantages of higher order single-loop electromechanical SigmaDeltaM have not been fully explored. High-performance inertial sensors require higher signal-to-quantization noise ratio (SQNR). This paper presents topologies for higher order single-loop electromechanical SigmaDeltaM with optimal stable coefficients that lead to a better SQNR. The topologies have good immunity to fabrication tolerances, which was verified by Monte Carlo analysis. The topologies are applicable not only to accelerometers but also to other inertial sensors such as gyroscopes.

Disciplines :

Electrical & electronics engineering

Author, co-author :

Dong, Yufeng

Kraft, Michaël ; Université de Liège - ULiège > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Systèmes microélectroniques intégrés

Redman-White, William

Language :

English

Title :

Higher order noise-shaping filters for high-performance micromachined accelerometers

Publication date :

2007

Journal title :

IEEE Transactions on Instrumentation and Measurement

ISSN :

0018-9456

eISSN :

1557-9662

Publisher :

Institute of Electrical and Electronics Engineers, United States - New York

Volume :

Issue :

Pages :

1666-1674

Peer reviewed :

Peer Reviewed verified by ORBi

Additional URL :

http://ieeexplore.ieee.org/stamp/stamp.jsp?arnumber=4303399

Available on ORBi :

since 13 April 2016

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Bibliography

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