System level simulation of an electrostatically levitated disk

Kraft, Michaël; Evans, Alan

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System level simulation of an electrostatically levitated disk

Kraft, Michaël; Evans, Alan

2000 • In International Conference on Modeling and Simulation of Microsystems : MSM 2000

Peer reviewed

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https://hdl.handle.net/2268/192181

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Disciplines :

Electrical & electronics engineering

Author, co-author :

Kraft, Michaël ; Université de Liège - ULiège > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Systèmes microélectroniques intégrés

Evans, Alan

Language :

English

Title :

System level simulation of an electrostatically levitated disk

Publication date :

March 2000

Event name :

Proc. 3rd Conf. on Modeling and Simulation of Microsystems

Event place :

San Diego, United States - California

Event date :

March 2000

By request :

Yes

Audience :

International

Main work title :

International Conference on Modeling and Simulation of Microsystems : MSM 2000

ISBN/EAN :

0-9666135-7-0

Pages :

PP. 130-133

Peer reviewed :

Peer reviewed

Commentary :

130--133

Available on ORBi :

since 25 January 2016

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Bibliography

Fukatsu, K, et. al., "Electrostatically levitated micro motor for inertia measurement system," Transducer '99, 3P2.16, 1999.
Torti, R, et. al., "Electrostatically suspended and sensed micromechanical rate gyroscope," SPIE, Vol 2200, pp 27-38, 1994.
Lemkin, M.A. and Boser, B.E., "A 3-axis micromachined accelerometer with a CMOS position-sense interface and digital offset-trim electrodes." IEEE J. of Solid-State Circuits, Vol. 34, No. 4, pp. 456-468, 1999.
Kraft, M., "Closed loop accelerometer employing oversampling conversion." Coventry Uni., Ph.D. dissertation, 1997.
Boser, B. E. and Howe, R. J., "Surface micromachined accelerometers," IEEE J. of Solid-State Circuits, Vol. 31, No. 3, pp. 336-375, 1996.