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A 3-dimensional actuator based on a novel combination of thermally actuated planar and vertical bimorphs
Sehr, Harald; Evans, Alan G. R.; Brunnschweiler, Arthur et al.
2000In Actuator 2000
Peer reviewed
 

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Disciplines :
Electrical & electronics engineering
Author, co-author :
Sehr, Harald
Evans, Alan G. R.
Brunnschweiler, Arthur
Ensell, G. J.
Kraft, Michaël ;  Université de Liège - ULiège > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Systèmes microélectroniques intégrés
Language :
English
Title :
A 3-dimensional actuator based on a novel combination of thermally actuated planar and vertical bimorphs
Publication date :
June 2000
Event name :
Proc. 7th Int. Conf. On New Actuators
Event place :
Bremen, Germany
Event date :
June 2000
By request :
Yes
Audience :
International
Main work title :
Actuator 2000
Pages :
pp. 486-489
Peer reviewed :
Peer reviewed
Commentary :
486--489
Available on ORBi :
since 25 January 2016

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