Reference : A monolithic surface micromachined Z-axis gyroscope with digital output
Scientific congresses and symposiums : Paper published in a book
Engineering, computing & technology : Electrical & electronics engineering
http://hdl.handle.net/2268/192178
A monolithic surface micromachined Z-axis gyroscope with digital output
English
Jiang, Xuesong [> >]
Seeger, Joseph I. [> >]
Kraft, Michaël mailto [Université de Liège - ULiège > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Systèmes microélectroniques intégrés >]
Boser, Bernhard E. [> >]
Jun-2000
2000 Symposium on VLSI Circuits
pp. 16-19
Yes
Yes
International
0-7803-6309-4
Proc. Symposium on VLSI Circuits
June 2000
Hawaii
HA
[en] A monolithic surface micromachined Z-axis vibratory rate gyroscope with an on-chip A/D converter is fabricated in a monolithic MEMS/circuits technology with 2 /spl mu/m CMOS and 2.25 /spl mu/m-thick mechanical polysilicon. The on-chip position sense circuit uses correlated double sampling to reject 1/f and kT/C noise and resolves 0.02 angstrom displacements. The gyroscope achieves a noise floor of 3/spl deg//sec//spl radic/Hz at atmospheric pressure and operates from a single 5 V supply.
Researchers ; Professionals ; Students
http://hdl.handle.net/2268/192178
10.1109/VLSIC.2000.852839
http://ieeexplore.ieee.org/stamp/stamp.jsp?arnumber=852839
16--19

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