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Electrostatic suspension control for micromachined inertial sensors employing a levitated-disk proof mass
Damrongsak, Badin; Kraft, Michaël
2005In 16th European Workshop on Micromechanics. [MME 2005]
Peer reviewed
 

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Disciplines :
Electrical & electronics engineering
Author, co-author :
Damrongsak, Badin
Kraft, Michaël ;  Université de Liège - ULiège > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Systèmes microélectroniques intégrés
Language :
English
Title :
Electrostatic suspension control for micromachined inertial sensors employing a levitated-disk proof mass
Publication date :
September 2005
Event name :
Proc. MME 2005 Conference
Event place :
Sweden
Event date :
September 2005
By request :
Yes
Audience :
International
Main work title :
16th European Workshop on Micromechanics. [MME 2005]
Pages :
pp. 240-243
Peer reviewed :
Peer reviewed
Commentary :
240--243
Available on ORBi :
since 25 January 2016

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