Back
  1. Home
  3. Detailled Reference
No full text
Paper published in a book (Scientific congresses and symposiums)
Electrostatic suspension control for micromachined inertial sensors employing a levitated-disk proof mass
Damrongsak, Badin; Kraft, Michaël
2005 • In 16th European Workshop on Micromechanics. [MME 2005]
Peer reviewed
Permalink
https://hdl.handle.net/2268/192165
 

Files (0)Send toDetailsStatisticsBibliographySimilar publications

Files

Full Text
No document available.

Send to


Details


Disciplines :
Electrical & electronics engineering
Author, co-author :
Damrongsak, Badin
Kraft, Michaël ;  Université de Liège - ULiège > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Systèmes microélectroniques intégrés
Language :
English
Title :
Electrostatic suspension control for micromachined inertial sensors employing a levitated-disk proof mass
Publication date :
September 2005
Event name :
Proc. MME 2005 Conference
Event place :
Sweden
Event date :
September 2005
By request :
Yes
Audience :
International
Main work title :
16th European Workshop on Micromechanics. [MME 2005]
Pages :
pp. 240-243
Peer reviewed :
Peer reviewed
Commentary :
240--243
Available on ORBi :
since 25 January 2016

Statistics

Number of views
41 (1 by ULiège)
Number of downloads
0 (0 by ULiège)
More statistics

Bibliography

Similar publications


Contact ORBi