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Investigation of diaphragm deflection of an absolute MEMS capacitive polysilicon pressure sensor
Walk, C; Goehlich, A; Giese, A et al.
2015In Proc. SPIE Microtechnologies, Smart Sensors, Actuators, and MEMS VII
Peer reviewed
 

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Disciplines :
Electrical & electronics engineering
Author, co-author :
Walk, C
Goehlich, A
Giese, A
Goertz, M
Vogt, H
Kraft, Michael ;  Université de Liège > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Systèmes microélectroniques intégrés
Language :
English
Title :
Investigation of diaphragm deflection of an absolute MEMS capacitive polysilicon pressure sensor
Publication date :
May 2015
Event name :
Proc. SPIE Microtechnologies, Smart Sensors, Actuators, and MEMS VII
Event place :
Barcelona, Spain
Event date :
May 2015
Audience :
International
Main work title :
Proc. SPIE Microtechnologies, Smart Sensors, Actuators, and MEMS VII
Peer reviewed :
Peer reviewed
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since 25 January 2016

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