Reference : Investigation of diaphragm deflection of an absolute MEMS capacitive polysilicon pres...
Scientific congresses and symposiums : Paper published in a book
Engineering, computing & technology : Electrical & electronics engineering
http://hdl.handle.net/2268/192157
Investigation of diaphragm deflection of an absolute MEMS capacitive polysilicon pressure sensor
English
Walk, C [> >]
Goehlich, A [> >]
Giese, A [> >]
Goertz, M [> >]
Vogt, H [> >]
Kraft, Michael mailto [Université de Liège > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Systèmes microélectroniques intégrés >]
May-2015
Proc. SPIE Microtechnologies, Smart Sensors, Actuators, and MEMS VII
Yes
International
Proc. SPIE Microtechnologies, Smart Sensors, Actuators, and MEMS VII
May 2015
Barcelona
Spain
Researchers ; Professionals ; Students
http://hdl.handle.net/2268/192157

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