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Performance analysis of a micromachined electrostatically suspended gyroscope employing sigma-delta force feedback
Damrongsak, Badin; Kraft, Michaël
2007In MME 2007: 18th Workshop on MicroMechanics Europe
Peer reviewed
 

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Disciplines :
Electrical & electronics engineering
Author, co-author :
Damrongsak, Badin
Kraft, Michaël ;  Université de Liège - ULiège > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Systèmes microélectroniques intégrés
Language :
English
Title :
Performance analysis of a micromachined electrostatically suspended gyroscope employing sigma-delta force feedback
Publication date :
September 2007
Event name :
Proc. MME2007 Conference
Event place :
Portugal
Event date :
September 2007
Audience :
International
Main work title :
MME 2007: 18th Workshop on MicroMechanics Europe
Publisher :
Universidade do Minho
Pages :
pp. 269-272
Peer reviewed :
Peer reviewed
Commentary :
269--272
Available on ORBi :
since 20 January 2016

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