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Abstract :
[en] The design and micro-fabrication of a new combined temperature and conductivity sensor is presented. The temperature sensor is based on a thermistor and the conductivity sensor uses two planar electrodes built on a PCB board. Tests show the temperature sensor is accurate to 0.003degC and the conductivity sensor has an error within 2.7\% for KCI concentration range of 0.2-1 Mol/L.
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