Displacement amplification mechanism in a capacitive accelerometer

Zeimpekis, Ioannis; Kraft, Michaël

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Displacement amplification mechanism in a capacitive accelerometer

Zeimpekis, Ioannis; Kraft, Michaël

2008 • In MME 2008: Technical digest

Peer reviewed

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https://hdl.handle.net/2268/191729

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Disciplines :

Electrical & electronics engineering

Author, co-author :

Zeimpekis, Ioannis

Kraft, Michaël ; Université de Liège - ULiège > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Systèmes microélectroniques intégrés

Language :

English

Title :

Displacement amplification mechanism in a capacitive accelerometer

Publication date :

September 2008

Event name :

Proc. MME 2008 Conference

Event place :

Aachen, Germany

Event date :

September 2008

Audience :

International

Main work title :

MME 2008: Technical digest

ISBN/EAN :

978-3-00-025529-8

Peer reviewed :

Peer reviewed

Commentary :

291--294

Available on ORBi :

since 20 January 2016

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