A study of levitation forces in MEMS devices

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Paper published in a book (Scientific congresses and symposiums)

Sari, Ibrahim; Cardwell, C.; Kraft, Michaël

2009 • In MME 2009

Peer reviewed

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https://hdl.handle.net/2268/191723

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Disciplines :

Electrical & electronics engineering

Author, co-author :

Sari, Ibrahim

Cardwell, C.

Kraft, Michaël ; Université de Liège - ULiège > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Systèmes microélectroniques intégrés

Language :

English

Title :

A study of levitation forces in MEMS devices

Publication date :

September 2009

Event name :

Proc. MME 2009 Conference

Event place :

Toulouse, France

Event date :

septembre 2009

Audience :

International

Main work title :

MME 2009

Peer reviewed :

Peer reviewed

Commentary :

paper A08 (ID 117)

Available on ORBi :

since 20 January 2016

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