Dong, Y., Kraft, M., Gollasch, C, Redman-White, W., A high-performance accelerometer with a fifth-order sigma-delta modulator, J. Micromech. Microeng., pp. S22-S29, (2005).
Liu, X., Liu, Y., Chen, W., Wu, Q., A fourth-order sigma-delta interface circuit for closed-loop micromachined accelerometer, Proc. of the Eurosensors XXII conference, pp. 1187-11901, (2009).
Almutairi, B. and Kraft, M. Comparative study of multi stage noise shaping and single loop sigma-delta modulators for MEMS accelerometers. Proc. Eurosensors XXIV Conference, pp. 512-515, (2010).
Sari, I., Zeimpekis, I. and Kraft, M. A full wafer dicing free dry release process for MEMS devices. Proc. Eurosensors XXIV Conference, pp. 850-853, (2010).