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Design and Fabrication of a self-aligning gas/liquid micropump.
Schabmueller, CGJ; Koch, M; Kraft, Michael et al.
2000 • In Proc. SPIE Micromachining and Microfabrication Conference - Microfluid Devices and Systems III
Peer reviewed
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Disciplines :
Electrical & electronics engineering
Author, co-author :
Schabmueller, CGJ
Koch, M
Kraft, Michael ;  Université de Liège > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Systèmes microélectroniques intégrés
Evans, AGR
Brunnschweiler, A
Language :
English
Title :
Design and Fabrication of a self-aligning gas/liquid micropump.
Publication date :
2000
Event name :
Proc. SPIE Micromachining and Microfabrication Conference - Microfluid Devices and Systems III
Event place :
Santa Clara, United States - California
Event date :
2000
By request :
Yes
Audience :
International
Main work title :
Proc. SPIE Micromachining and Microfabrication Conference - Microfluid Devices and Systems III
Pages :
pp. 282-290
Peer reviewed :
Peer reviewed
Available on ORBi :
since 10 November 2015

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