Modelling of an accelerometer based on a levitated proof mass

Houlihan, R; Kraft, Michael

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Modelling of an accelerometer based on a levitated proof mass

Houlihan, R; Kraft, Michael

2001 • In Proc. Conf. on Micromechanics Europe

Peer reviewed

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https://hdl.handle.net/2268/187894

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Disciplines :

Electrical & electronics engineering

Author, co-author :

Houlihan, R

Kraft, Michael ; Université de Liège > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Systèmes microélectroniques intégrés

Language :

English

Title :

Modelling of an accelerometer based on a levitated proof mass

Publication date :

2001

Event name :

Proc. Conf. on Micromechanics Europe

Event place :

Cork, Ireland

Event date :

2001

By request :

Yes

Audience :

International

Main work title :

Proc. Conf. on Micromechanics Europe

Pages :

pp. 313-316

Peer reviewed :

Peer reviewed

Available on ORBi :

since 10 November 2015

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