Reference : Realisation of electroplating moulds with different thick photoresists for MEMS appli...
Scientific congresses and symposiums : Paper published in a book
Engineering, computing & technology : Electrical & electronics engineering
http://hdl.handle.net/2268/187861
Realisation of electroplating moulds with different thick photoresists for MEMS applications
English
Kukharenka, A. []
Kraft, Michael mailto [Université de Liège > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Systèmes microélectroniques intégrés >]
Jun-2002
Proc. 4th International Conference on Material for Microelectronics and Nanoengineering
pp. 165-168
Yes
Yes
International
Proc. 4th International Conference on Material for Microelectronics and Nanoengineering
Juin 2002
Espoo
Finland
Researchers ; Students
http://hdl.handle.net/2268/187861

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