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An integrated Surface micromachined capacitive lateral accelerometer with 2 uG/rt-Hz resolution
Jiang, Xuesong; Wang, Feiyue; Kraft, Michael et al.
2002 • In Tech. Digest of Solid State Sensor and Actuator Workshop
Peer reviewed
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https://hdl.handle.net/2268/187853
 

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Disciplines :
Electrical & electronics engineering
Author, co-author :
Jiang, Xuesong
Wang, Feiyue
Kraft, Michael ;  Université de Liège > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Systèmes microélectroniques intégrés
Boser, Bernhard E.
Language :
English
Title :
An integrated Surface micromachined capacitive lateral accelerometer with 2 uG/rt-Hz resolution
Publication date :
June 2002
Event name :
Tech. Digest of Solid State Sensor and Actuator Workshop
Event place :
Hilton Head Island, United States - South Carolina
Event date :
Juin 2002
By request :
Yes
Audience :
International
Main work title :
Tech. Digest of Solid State Sensor and Actuator Workshop
Pages :
pp. 202-205
Peer reviewed :
Peer reviewed
Available on ORBi :
since 09 November 2015

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