[en] The current paper describes the design and fabrication of a micromachined electrostatically
suspended gyroscope. Electrostatic levitation is employed to suspend the rotor, eliminating
the mechanical bearing and thus friction effects between the rotor and the substrate,
hence improving long-term stability. The rate of rotation can be measured by detecting the
torque-induced displacement of the spinning rotor using capacitive interface circuits. The
device structure and its basic operating principle are described, as well as theoretical background
and design considerations. The fabrication process of the gyroscope relies on glass/silicon/ glass stack bonding and deep dry etching and is outlined in detail. Initial prototypes realized with this fabrication process are presented and described.
Disciplines :
Electrical & electronics engineering
Author, co-author :
Damrongsak, Badin
Kraft, Michaël ; Université de Liège - ULiège > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Systèmes microélectroniques intégrés
Rajgopal, S.
Mehregany, M.
Language :
English
Title :
Design and fabrication of a micromachined electrostatically suspended gyroscope
Publication date :
2008
Journal title :
Proceedings of the Institution of Mechanical Engineers. Part C, Journal of Mechanical Engineering Science
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