Reference : Three dimensional electrostatic actuators for tunable optical micro cavities
Scientific journals : Article
Engineering, computing & technology : Electrical & electronics engineering
Three dimensional electrostatic actuators for tunable optical micro cavities
Srinivasan, Prasanna [> >]
Gollasch, Carsten O. [> >]
Kraft, Michaël mailto [Université de Liège - ULiège > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Systèmes microélectroniques intégrés >]
Sensors and Actuators. A, Physical
Elsevier Science
Yes (verified by ORBi)
[en] The ability to fabricate micro scale structures with three dimensional features can augment the design opportunities to realise novel devices. This paper discusses the theoretical and experimental performance of a three dimensional Micro-Opto-Electromechanical systems (MOEMS) device which consists of a planar micro mirror positioned in the in-plane and out-of-plane directions by electrostatic actuators. The actuator consists of a mechanically compliant structure micromachined on a bonded Si–Glass substrate. Experimental investigation of the steady state performance of the actuator revealed that the planar mirror can be actuated about ∼3–6 m in the in-plane direction at 90 Vdc and about ∼2 m in the out-of-plane direction at 25 Vdc respectively. The device was found to be dynamically stable for any stray ambient excitations <1.6 kHz in air. The suitability of the device for misalignment compensation in stacked multi-layers is discussed; this will enable for realising tunable optical micro cavities for atom detection.
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