Design and implementation of a MASH2-0 Electromechanical Sigma-Delta Modulator for capacitive MEMS sensors using dual quantization method

Almutairi, Bader; Alsheri, Ali; Kraft, Michael

doi:10.1109/JMEMS.2015.2443077

Article (Scientific journals)

Design and implementation of a MASH2-0 Electromechanical Sigma-Delta Modulator for capacitive MEMS sensors using dual quantization method

Almutairi, Bader; Alsheri, Ali; Kraft, Michael

2015 • In Journal of Microelectromechanical Systems

Peer Reviewed verified by ORBi

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https://hdl.handle.net/2268/186030

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10.1109/JMEMS.2015.2443077

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Abstract :

[en] In this paper, a new control structure based on the dual quantization technique is presented for an electromechanical sigma–delta modulator (EM-SD M) applied to a microelectromechanical system (MEMS) accelerometer. The modulator adopts a 2-0 multistage noise shaping structure (MASH2-0), taking the advantage of the intrinsic linearity of single-bit quantization and the reduced quantization error of multibit quantization in a single modulator. The sensor system is studied by the system-level modeling and the hardware implementation based on the field-programmable gate array technology. The study shows that, MASH2-0 shares the benefits of a MASH2-2 architecture of having an inherent stability, a high overload input level, and a high dynamic range compared with single-loop EM-SD M. However, the MASH2-0 architecture benefits from a considerably simpler implementation, while achieving a higher dynamic range and a higher signal-to-noise ratio compared with a MASH2-2 and a fourth-order single-loop SDM architecture. A capacitive MEMS accelerometer was designed and employed with this control system. Within a bandwidth of 1 kHz, the sensor achieved a noise floor level of −130 dB and a bias instability as low as 20 μg at an integration time of 40 s. Simulation estimated a full scale of ±20 g acceleration. The investigation confirms the concept of the MASH2-0 structure and shows its potential as a closed-loop interface for high-performance capacitive MEMS accelerometers.

Disciplines :

Electrical & electronics engineering

Author, co-author :

Almutairi, Bader

Alsheri, Ali

Kraft, Michael ; Université de Liège > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Systèmes microélectroniques intégrés

Language :

English

Title :

Design and implementation of a MASH2-0 Electromechanical Sigma-Delta Modulator for capacitive MEMS sensors using dual quantization method

Publication date :

September 2015

Journal title :

Journal of Microelectromechanical Systems

ISSN :

1057-7157

eISSN :

1941-0158

Publisher :

IEEE

Peer reviewed :

Peer Reviewed verified by ORBi

Available on ORBi :

since 18 September 2015

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