[en] This paper describes a novel MEMS resonant accelerometer based on two weakly coupled resonators (WCRs) using the phenomenon of mode localization. It is the first time that this principle is demonstrated experimentally for an accelerometer. The measured relative shift in amplitude ratio (~312162 ppm/g) is 302 times higher than the shift in resonance frequency (~1035 ppm/g).
Disciplines :
Electrical & electronics engineering
Author, co-author :
Zhang, Hemin
Yuan, W.Z.
Li, B.Y.
Hao, Y.C.
Kraft, Michael ; Université de Liège > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Systèmes microélectroniques intégrés
Chang, Honglong
Language :
English
Title :
A novel resonant accelerometer based on model localization of weakly coupled resonators.
Publication date :
June 2015
Event name :
18th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2015)
Event place :
Anchorage, United States
Event date :
from 21-06-2015 to 25-06-2015
Main work title :
Proceedings of Solid-State Sensors, Actuators and Microsystems (Transducers 2015)
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