A novel resonant accelerometer based on model localization of weakly coupled resonators.

[en] This paper describes a novel MEMS resonant accelerometer based on two weakly coupled resonators (WCRs) using the phenomenon of mode localization. It is the first time that this principle is demonstrated experimentally for an accelerometer. The measured relative shift in amplitude ratio (~312162 ppm/g) is 302 times higher than the shift in resonance frequency (~1035 ppm/g).

Disciplines :

Electrical & electronics engineering

Author, co-author :

Zhang, Hemin

Yuan, W.Z.

Li, B.Y.

Hao, Y.C.

Kraft, Michael ; Université de Liège > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Systèmes microélectroniques intégrés

Chang, Honglong

Language :

English

Title :

A novel resonant accelerometer based on model localization of weakly coupled resonators.

Publication date :

June 2015

Event name :

18th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2015)

Event place :

Anchorage, United States

Event date :

from 21-06-2015 to 25-06-2015

Main work title :

Proceedings of Solid-State Sensors, Actuators and Microsystems (Transducers 2015)

Peer reviewed :

Peer reviewed

Available on ORBi :

since 14 July 2015

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Bibliography

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