[en] This paper reports on a 3-DoF mode localization resonant sensor experimentally evaluated under atmospheric conditions. It was demonstrated that using amplitude ratio as an output signal, even when the device is operated in air, yields a higher sensitivity compared to the frequency variation sensitivity when assuming vacuum conditions.
Disciplines :
Electrical & electronics engineering
Author, co-author :
Montaseri, Mohammad
Xie, J.B.
Chang, Homglong
Zhao, Chun
Wood, Graham
Kraft, Michael ; Université de Liège > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Systèmes microélectroniques intégrés
