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Atmospheric pressure mode localization coupled resonators stiffness sensor
Montaseri, Mohammad; Xie, J.B.; Chang, Homglong et al.
2015In Proceedings of Solid-State Sensors, Actuators and Microsystems (Transducers 2015)
Peer reviewed
 

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Abstract :
[en] This paper reports on a 3-DoF mode localization resonant sensor experimentally evaluated under atmospheric conditions. It was demonstrated that using amplitude ratio as an output signal, even when the device is operated in air, yields a higher sensitivity compared to the frequency variation sensitivity when assuming vacuum conditions.
Disciplines :
Electrical & electronics engineering
Author, co-author :
Montaseri, Mohammad
Xie, J.B.
Chang, Homglong
Zhao, Chun
Wood, Graham
Kraft, Michael ;  Université de Liège > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Systèmes microélectroniques intégrés
Language :
English
Title :
Atmospheric pressure mode localization coupled resonators stiffness sensor
Publication date :
June 2015
Event name :
18th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2015)
Event place :
Anchorage, United States
Event date :
from 21-06-2015 to 25-06-2015
Audience :
International
Main work title :
Proceedings of Solid-State Sensors, Actuators and Microsystems (Transducers 2015)
Peer reviewed :
Peer reviewed
Available on ORBi :
since 14 July 2015

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