Reference : Wet etching optimization for arbitrarly shaped planar electrode structures
Scientific congresses and symposiums : Paper published in a book
Engineering, computing & technology : Electrical & electronics engineering
http://hdl.handle.net/2268/183541
Wet etching optimization for arbitrarly shaped planar electrode structures
English
Rattanasonti, H []
Sterling, RC []
Srinivasan, P []
Hensinger, WK []
Kraft, Michael mailto [Université de Liège > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Systèmes microélectroniques intégrés >]
Sep-2010
Proceedings of "MME 2010 Conference, The Netherlands"
Yes
International
MME 2010 Conference
septembre 2010
Enschede
Netherlands
Researchers ; Professionals ; Students
http://hdl.handle.net/2268/183541

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