Reference : Deflection amplification mechanism in a capacitive accelerometer
Scientific congresses and symposiums : Paper published in a book
Engineering, computing & technology : Electrical & electronics engineering
http://hdl.handle.net/2268/183475
Deflection amplification mechanism in a capacitive accelerometer
English
Zeimpekis, A []
Sari, I []
Kraft, Michael mailto [Université de Liège > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Systèmes microélectroniques intégrés >]
Jun-2011
Proceedings of "Transducers 2011 Conference - Juin 2011"
1096-1100
Yes
International
Transducers Conference
Juin 2011
China
Researchers ; Professionals ; Students
http://hdl.handle.net/2268/183475

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