Experimental evaluation of a two degree of freedom capacitive MEMS sensor for velocity measurments

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Alshehri, A; Gardonio, P; Elliott, S et al.

2011 • In Proceedings of "Eurosensors XXV Conference, Athens, Septembre 2011"

Peer reviewed

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https://hdl.handle.net/2268/183465

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Disciplines :

Electrical & electronics engineering

Author, co-author :

Alshehri, A

Gardonio, P

Elliott, S

Zilletti, M

Kraft, Michael ; Université de Liège > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Systèmes microélectroniques intégrés

Language :

English

Title :

Experimental evaluation of a two degree of freedom capacitive MEMS sensor for velocity measurments

Publication date :

September 2011

Event name :

Eurosensors XXV Conference

Event place :

Athens, Greece

Event date :

septembre 2011

Audience :

International

Main work title :

Proceedings of "Eurosensors XXV Conference, Athens, Septembre 2011"

Peer reviewed :

Peer reviewed

Available on ORBi :

since 01 July 2015

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