Design of an ultra-sensitive MEMS force sensor utlizing mode localisation in weakly coupled resonators

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Zhao, C; Wood, GS; Suan, SH et al.

2012 • In Proceedings of "Micromechanics and Microsystems Europe Workshop: Allemagne - 2012"

Peer reviewed

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https://hdl.handle.net/2268/183435

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Disciplines :

Electrical & electronics engineering

Author, co-author :

Zhao, C

Wood, GS

Suan, SH

Kraft, Michael ; Université de Liège > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Systèmes microélectroniques intégrés

Language :

English

Title :

Design of an ultra-sensitive MEMS force sensor utlizing mode localisation in weakly coupled resonators

Publication date :

2012

Event name :

Micromechanics and Microsystems Europe Workshop

Event place :

Illmenau, Germany

Event date :

2012

Audience :

International

Main work title :

Proceedings of "Micromechanics and Microsystems Europe Workshop: Allemagne - 2012"

Peer reviewed :

Peer reviewed

Available on ORBi :

since 30 June 2015

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