Reference : Design of an ultra-sensitive MEMS force sensor utlizing mode localisation in weakly c...
Scientific congresses and symposiums : Paper published in a book
Engineering, computing & technology : Electrical & electronics engineering
http://hdl.handle.net/2268/183435
Design of an ultra-sensitive MEMS force sensor utlizing mode localisation in weakly coupled resonators
English
Zhao, C []
Wood, GS []
Suan, SH []
Kraft, Michael mailto [Université de Liège > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Systèmes microélectroniques intégrés >]
2012
Proceedings of "Micromechanics and Microsystems Europe Workshop: Allemagne - 2012"
Yes
International
Micromechanics and Microsystems Europe Workshop
2012
Illmenau
Germany
Researchers ; Professionals ; Students
http://hdl.handle.net/2268/183435

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