Reference : Low noise vacuum-packaged MEMS closed-loop accelerometer using sixth-order multi-feed...
Scientific congresses and symposiums : Paper published in a book
Engineering, computing & technology : Electrical & electronics engineering
http://hdl.handle.net/2268/183416
Low noise vacuum-packaged MEMS closed-loop accelerometer using sixth-order multi-feedback loops and local resonator sigma-delta modulators
English
Chen, F []
Yuan, W []
Chang, H []
Zeimpekis, I []
Kraft, Michael mailto [Université de Liège > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Systèmes microélectroniques intégrés >]
Jan-2014
Proceedings of "IEEE MEMS Conf. : San Francisco- Janvier 2014"
761-764
Yes
International
IEEE MEMS Conf.
Janvier 2014
San Francisco
CA
Researchers ; Professionals ; Students
http://hdl.handle.net/2268/183416

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