microelectromechanical systems (MEMS); Nonlinear; Dynamics
Abstract :
[en] The dynamic response of a mass-spring model of electrostatically actuated MEMS is analyzed when a voltage step is applied. The dynamics of a clamped-clamped beam representing a
micro-bridge system are also considered. To model and simulate the strong coupling between the electric and mechanical fields, a general finite element program has been developed based on a new monolithic formulation. The methodology proposed in this program does not require any iterative numerical scheme based on separate electrostatic and mechanical solvers, respectively.
Disciplines :
Mathematics Mechanical engineering Physics
Author, co-author :
Rochus, Véronique ; Université de Liège - ULiège > Département d'aérospatiale et mécanique > LTAS - Vibrations et identification des structures
Kerschen, Gaëtan ; Université de Liège - ULiège > Département d'aérospatiale et mécanique > Laboratoire de structures et systèmes spatiaux
Golinval, Jean-Claude ; Université de Liège - ULiège > Département d'aérospatiale et mécanique > LTAS - Vibrations et identification des structures
Language :
English
Title :
Dynamic analysis of the nonlinear behavior of MEMS using the finite element formulation
Publication date :
September 2005
Event name :
ASME International Design Engineering Technical Conferences & Computers and Information in Engineering Conference
Event organizer :
ASME 2005
Event place :
Long Beach, United States
Event date :
September 24-28, 2005
Audience :
International
Main work title :
ASME International Design Engineering Technical Conferences & Computers and Information in Engineering Conference, Long Beach, 2005
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