Reference : A dicing free SOI process for MEMS devices
Scientific journals : Article
Engineering, computing & technology : Electrical & electronics engineering
http://hdl.handle.net/2268/179634
A dicing free SOI process for MEMS devices
English
Sari, Ibrahim [> >]
Zeimpekis, Ioannis [> >]
Kraft, Michaël mailto [Université de Liège - ULiège > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Systèmes microélectroniques intégrés >]
2012
Microelectronic Engineering
95
121--129
Yes (verified by ORBi)
International
0167-9317
Researchers
http://hdl.handle.net/2268/179634
10.1016/j.mee.2012.02.004
http://www.sciencedirect.com/science/article/pii/S0167931712000238

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