Design, modeling, fabrication, and evaluation of thermoelectric generators with hot-wire chemical vapor deposited polysilicon as thermoelement material
De Leon, M. T.; Tarazona, Antulio; Chong, Haroldet al.
2014 • In Journal of Electronic Materials, 43 (11), p. 4070-4081
Kraft, Michaël ; Université de Liège - ULiège > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Systèmes microélectroniques intégrés
Language :
English
Title :
Design, modeling, fabrication, and evaluation of thermoelectric generators with hot-wire chemical vapor deposited polysilicon as thermoelement material