Article (Scientific journals)
Encapsulation of implantable integrated MEMS pressure sensors using Polyimide Epoxy composite and Atomic Layer Deposition
Gembaczka, Pierre; Goertz, Michael; Goehlich, Andreas et al.
2014In Journal of Sensors and Sensor Systems
Peer Reviewed verified by ORBi
 

Files


Full Text
JSSS ALD encapsulation Gembazka 2014.pdf
Publisher postprint (3.31 MB)
Download

All documents in ORBi are protected by a user license.

Send to



Details



Disciplines :
Electrical & electronics engineering
Author, co-author :
Gembaczka, Pierre
Goertz, Michael
Goehlich, Andreas
Mokwa, Wilfried
Kraft, Michael ;  Université de Liège - ULiège > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Systèmes microélectroniques intégrés
Language :
English
Title :
Encapsulation of implantable integrated MEMS pressure sensors using Polyimide Epoxy composite and Atomic Layer Deposition
Publication date :
2014
Journal title :
Journal of Sensors and Sensor Systems
ISSN :
2194-8771
eISSN :
2194-878X
Publisher :
Copernicus Publications, Germany
Peer reviewed :
Peer Reviewed verified by ORBi
Available on ORBi :
since 04 March 2015

Statistics


Number of views
110 (0 by ULiège)
Number of downloads
365 (1 by ULiège)

Scopus citations®
 
9
Scopus citations®
without self-citations
4
OpenCitations
 
7
OpenAlex citations
 
6

Bibliography


Similar publications



Contact ORBi