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Phase Change Memories challenges: A material and process perspective
Maitrejean, S.; Ghezzi, G.; Gourvest, E. et al.
2012In IEEE International Interconnect Technology Conference
Peer reviewed
 

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Keywords :
Amorphous phase; Materials and process; Phase change materials
Abstract :
[en] Among all the new memories concepts, Phase Change Memories (PCM) is one of the most promising. However, various challenges remain. This paper reviews the materials and processes required to face these challenges. As an example, attention will be made on the effect of Phase change material composition on stability of the amorphous phase i.e. on the retention of the information. Additionally, it is showed how specific processes such as CVD or ALD can be developed in order to minimize the current required to amorphize the phase change material i.e. to reset the device. Finally, with the perspectives of the advanced integration nodes, experimental results on the effect of scaling on phase transformation are presented and discussed. © 2012 IEEE.
Disciplines :
Materials science & engineering
Author, co-author :
Maitrejean, S.;  CEA, LETI, MINATEC Campus, 17 rue des Martyrs, 38054 Grenoble, France
Ghezzi, G.;  CEA, LETI, MINATEC Campus, 17 rue des Martyrs, 38054 Grenoble, France, Laboratoire des Matériaux et du Génie Physique (Grenoble-INP, CNRS), Minatec, 3 Parvis L. Neel, 38016 Grenoble, France
Gourvest, E.;  CEA, LETI, MINATEC Campus, 17 rue des Martyrs, 38054 Grenoble, France, LTM-Leti, Minatec Campus, F38054 Grenoble, France, STMicroelectronics, 38926 Crolles, France
Beneventi, G. B.;  CEA, LETI, MINATEC Campus, 17 rue des Martyrs, 38054 Grenoble, France
Fantini, A.;  CEA, LETI, MINATEC Campus, 17 rue des Martyrs, 38054 Grenoble, France
Pashkov, N.;  CEA, LETI, MINATEC Campus, 17 rue des Martyrs, 38054 Grenoble, France
Navarro, G.;  CEA, LETI, MINATEC Campus, 17 rue des Martyrs, 38054 Grenoble, France
Roule, A.;  CEA, LETI, MINATEC Campus, 17 rue des Martyrs, 38054 Grenoble, France
Fillot, F.;  CEA, LETI, MINATEC Campus, 17 rue des Martyrs, 38054 Grenoble, France
Noe, Pascal ;  Université de Liège - ULiège > Architecture Site Lambert Lombard > Architecture Site Lambert Lombard
Lhostis, S.;  STMicroelectronics, 38926 Crolles, France
Cueto, O.;  CEA, LETI, MINATEC Campus, 17 rue des Martyrs, 38054 Grenoble, France
Jahan, C.;  CEA, LETI, MINATEC Campus, 17 rue des Martyrs, 38054 Grenoble, France
Nodin, J. F.;  CEA, LETI, MINATEC Campus, 17 rue des Martyrs, 38054 Grenoble, France
Persico, A.;  CEA, LETI, MINATEC Campus, 17 rue des Martyrs, 38054 Grenoble, France
Armand, M.;  CEA, LETI, MINATEC Campus, 17 rue des Martyrs, 38054 Grenoble, France
Dussault, L.;  LTM-Leti, Minatec Campus, F38054 Grenoble, France
Vallé, C.;  LTM-Leti, Minatec Campus, F38054 Grenoble, France
Michallon, P.;  CEA, LETI, MINATEC Campus, 17 rue des Martyrs, 38054 Grenoble, France
Morel, R.;  INAC/SP2M, Université Joseph Fourier, CEA Grenoble, 17 rue des Martyrs, 38054 Grenoble, France
Brenac, A.;  INAC/SP2M, Université Joseph Fourier, CEA Grenoble, 17 rue des Martyrs, 38054 Grenoble, France
Audier, M.;  Laboratoire des Matériaux et du Génie Physique (Grenoble-INP, CNRS), Minatec, 3 Parvis L. Neel, 38016 Grenoble, France
Raty, Jean-Yves  ;  Université de Liège - ULiège > Département de physique > Physique de la matière condensée
Hippert, F.;  Laboratoire des Matériaux et du Génie Physique (Grenoble-INP, CNRS), Minatec, 3 Parvis L. Neel, 38016 Grenoble, France
Perniola, L.;  CEA, LETI, MINATEC Campus, 17 rue des Martyrs, 38054 Grenoble, France
Sousa, V.;  CEA, LETI, MINATEC Campus, 17 rue des Martyrs, 38054 Grenoble, France
De Salvo, B.;  CEA, LETI, MINATEC Campus, 17 rue des Martyrs, 38054 Grenoble, France
More authors (17 more) Less
Language :
English
Title :
Phase Change Memories challenges: A material and process perspective
Publication date :
2012
Event name :
2012 IEEE International Interconnect Technology Conference, IITC 2012
Event date :
4 June 2012 through 6 June 2012
Audience :
International
Journal title :
IEEE International Interconnect Technology Conference
Peer reviewed :
Peer reviewed
Name of the research project :
PERCEVALL project; MaxCaps project (2T210 - European Medea+ framework); Refined project (CT205 - European Medea+ framework)
Funders :
Nanoscience foundation
Available on ORBi :
since 11 March 2014

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