Reference : Nanomechanical and nanotribological characterization of microelectromechanical system
Scientific journals : Article
Engineering, computing & technology : Materials science & engineering
Engineering, computing & technology : Mechanical engineering
Nanomechanical and nanotribological characterization of microelectromechanical system
Pustan, Marius mailto [Technical University of Cluj-Napoca > Department of Machine Elements and Tribology > > >]
Muller, Raluca mailto [National Institute for R&D in Microtechnologies (IMT-Bucharest) > > > >]
Golinval, Jean-Claude mailto [Université de Liège - ULiège > Département d'aérospatiale et mécanique > LTAS - Vibrations et identification des structures >]
Journal of Optoelectronics and Advanced Materials [= JOAM]
[en] Flexible microcomponents ; Stiffness ; Frequency response ; Quality factor ; Friction and stiction
[en] Investigations of the mechanical and tribological properties of microelectromechanical system (MEMS) components on nanoscale can provide insights into failure mechanism of material. The main goal of this paper is focused on the mechanical and tribological characterizations of MEMS mechanical components in order to improve their reliability design. The mechanical properties of interests are stiffness, modulus of elasticity, stress, strain. Dynamical investigations are performed to analyze the resonant frequency response, velocity and amplitude of oscillations of electrostatically actuated microcomponents and to estimate the quality factor. Finite element analysis is used to validate the experimental results of mechanical properties and to simulate the dynamical behaviour of investigated microcomponents. Tribological investigations are developed to estimate the stiction and friction. Testing and the individual characterization of MEMS materials and structures, performed using advanced equipments such as atomic force microscope and optical vibrometer analyzer are presented.
Région wallonne : Direction générale des Technologies, de la Recherche et de l'Energie - DGTRE ; Romanian National Authority for Scientific Research, CNCS-UEFISCDI
FIRST Post-Doc n°616365 (MOMIVAL)
Researchers ; Professionals

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