Laser thermoreflectance for semiconductor thin films metrology

Gailly, Patrick; Hastanin, Juriy; Duterte, Charles; Hernandez, Yves; Lecourt, Jean-Bernard; Kupisiewicz, Axel; Martin, Paul-Etienne; Fleury-Frenette, Karl

Request a copy

Paper published in a book (Scientific congresses and symposiums)

Laser thermoreflectance for semiconductor thin films metrology

Gailly, Patrick; Hastanin, Juriy; Duterte, Charles et al.

2012 • In Wehrspohn, R. B., Gombert, A (Ed.) Photonics for Solar Energy Systems IV

Permalink
https://hdl.handle.net/2268/117084

Files (1)Send to Details Statistics Bibliography Similar publications

Files

Full Text

SPIE_Photonics europe_2012_pgailly.pdf

Author preprint (1.1 MB)

Request a copy

All documents in ORBi are protected by a user license.

Send to

RIS BibTex APA Chicago Permalink X Linkedin

Details

Keywords :

laser scribing; solar cells; thermoreflectance; CdTe thin film; thermal diffusivity

Abstract :

[en] We present a thermoreflectance-based metrology concept applied to compound semiconductor thin films off-line characterization in the solar cells scribing process. The presented thermoreflectance setup has been used to evaluate the thermal diffusivity of thin CdTe films and to measure eventual changes in the thermal properties of 5 μm CdTe films ablated by nano and picosecond laser pulses. The temperature response of the CdTe thin film to the nanosecond heating pulse has been numerically investigated using the finite-difference time-domain (FDTD) method. The computational and experimental results have been compared.

Research Center/Unit :

CSL - Centre Spatial de Liège - ULiège

Disciplines :

Physical, chemical, mathematical & earth Sciences: Multidisciplinary, general & others

Author, co-author :

Gailly, Patrick ; Université de Liège - ULiège > CSL (Centre Spatial de Liège)

Hastanin, Juriy ; Université de Liège - ULiège > CSL (Centre Spatial de Liège)

Duterte, Charles

Hernandez, Yves

Lecourt, Jean-Bernard

Kupisiewicz, Axel

Martin, Paul-Etienne

Fleury-Frenette, Karl ; Université de Liège - ULiège > CSL (Centre Spatial de Liège)

Language :

English

Title :

Laser thermoreflectance for semiconductor thin films metrology

Publication date :

June 2012

Event name :

2012 Photonics Europe

Event organizer :

SPIE

Event date :

from 16-04-2012 to 19-04-2012

Audience :

International

Main work title :

Photonics for Solar Energy Systems IV

Editor :

Wehrspohn, R. B., Gombert, A

Collection name :

SPIE; 8438

Name of the research project :

MUSICAL

Funders :

DGTRE - Région wallonne. Direction générale des Technologies, de la Recherche et de l'Énergie

Available on ORBi :

since 19 April 2012

Statistics

Number of views

115 (18 by ULiège)

Number of downloads

3 (3 by ULiège)

More statistics

Scopus citations^®

Scopus citations^®
without self-citations

Bibliography

C. Duterte et al., "Ultra-short pulse fiber laser parameters optimization for CdTe thin film solar cells processing and fiber laser design", OSA conf. "Fiber Laser Applications, FILAS", (2011).
I. Hatta et al., "Thermal Diffusivity Measurements of Thin Films and Multilayered Composites", Int. J. Thermophysics, 11, 293 (1990).
T. Baba et al, "Measurements of thermophysical property of thin films by light pulse heating thermoreflectance methods", Therminic-2006 Nice, France, (2006).
W. Parker et al, "Flash method of determining thermal diffusivity, heat capacity and thermal conductivity", Journal of Applied Physics 32, 1679-1684 (1961).
M. Ozisik, "Heat Conduction", 2nd ed., John Wiley & Sons, New York, (1993).
A. Wawrzynek and M. Bartoszek, "Inverse heat transfer analyses as a tool of material parameter estimation", Proceedings of conf. "Thermo-physics 2006", Thermophysical Society, Bratislava, 3-19 (2006)
S. Zhvavyi et al, "Numerical Simulation of the Dynamics of Phase Transitions in CdTe Induced by Irradiation with Nanosecond Pulses of an Excimer Laser", Semiconductors, 40, (2006)
M. Mansuripur et al, "Laser-induced local heating of multilayers", J. of Applied Optics, 21, 1106-1114 (1982).
http://www.mmresearch.com
J. Bovatsek et al, "Effects of pulse duration on the ns-laser pulse induced removal of thin film materials used in photovoltaics", Proc. SPIE 7201, (2009)
L. Golovan et al, "Evaporation effect on laser induced solid-liquid phase transitions in CdTe and HgCdTe", Solid State Communications, 108, 707-712 (1998).
www.matweb.com