Reference : Laser thermoreflectance for semiconductor thin films metrology
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Physical, chemical, mathematical & earth Sciences : Multidisciplinary, general & others
Laser thermoreflectance for semiconductor thin films metrology
Gailly, Patrick mailto [Université de Liège - ULiège > > CSL (Centre Spatial de Liège) >]
Hastanin, Juriy mailto [Université de Liège - ULiège > > CSL (Centre Spatial de Liège) >]
Duterte, Charles [ > > ]
Hernandez, Yves [ > > ]
Lecourt, Jean-Bernard [ > > ]
Kupisiewicz, Axel [ > > ]
Martin, Paul-Etienne [ > > ]
Fleury-Frenette, Karl mailto [Université de Liège - ULiège > > CSL (Centre Spatial de Liège) >]
Photonics for Solar Energy Systems IV
Wehrspohn, R. B., Gombert, A
SPIE; 8438
2012 Photonics Europe
from 16-04-2012 to 19-04-2012
[en] laser scribing ; solar cells ; thermoreflectance ; CdTe thin film ; thermal diffusivity
[en] We present a thermoreflectance-based metrology concept applied to compound semiconductor thin films off-line characterization in the solar cells scribing process. The presented thermoreflectance setup has been used to evaluate the thermal diffusivity of thin CdTe films and to measure eventual changes in the thermal properties of 5 μm CdTe films ablated by nano and picosecond laser pulses. The temperature response of the CdTe thin film to the nanosecond heating pulse has been numerically investigated using the finite-difference time-domain (FDTD) method. The computational and experimental results have been compared.
Centre Spatial de Liège - CSL
Région wallonne : Direction générale des Technologies, de la Recherche et de l'Energie - DGTRE
Researchers ; Professionals

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