[en] This paper presents the advantages of a strong coupled formulation to model the electro-mechanical coupling appearing in MEMS. Usually the classical softwares use a staggered methodology iterating between two different codes to obtain the solution of the coupled problem. In this research a strong coupled formulation is proposed and a tangent stiffness matrix of the whole problem is computed. Using this matrix, nonlinear algorithms such as the Riks-Crisfield algorithm may be applied to solve the static nonlinear problem and determine accurately the static pull-in voltage. Moreover, the natural frequencies may be computed around each equilibrium positions. The dynamic behaviour of the structure may also be studied and two new parameters are defined: the dynamic pull-in voltage and the dynamic pull-in time. This strong coupled methodology deriving from variational principle may also be used for topology optimisation and extended finite elements.
Disciplines :
Mechanical engineering Mathematics
Author, co-author :
Rochus, Véronique ; Université de Liège - ULiège > Département d'aérospatiale et mécanique > LTAS - Vibrations et identification des structures
Rixen, D. J.; 2T.U. Delft, O.C.P, Engineering Dynamics, Delft, The Netherlands
Golinval, Jean-Claude ; Université de Liège - ULiège > Département d'aérospatiale et mécanique > LTAS - Vibrations et identification des structures
Language :
English
Title :
On the Advantages of Using a Strong Coupling Variational Formulation to Model Electro-Mechanical Problem
Publication date :
April 2006
Event name :
7th IEEE EuroSimE conference
Event place :
Como, Italy
Audience :
International
Main work title :
Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro/Nanoelectronics and Systems, Proceedings of EuroSimE 2006
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Bibliography
ANSYS, Training Manual Introduction to ANSYS 5.7 for MEMS, First Edition ANSYS Release: 5.7, 2001.
V. Rochus, D.J. Rixen, J.C. Golinval "Monolithical Modeling of Electro-Mechanical Coupling in Micro-Structures." International Journal for Numerical Methods in Engineering.
W. S. Lee and K. C. Kwon and B. K. Kim and J. H. Cho and S. K. Young, "Frequency-shifting Analysis of Electrostatically Tunable Micro-mechanical Actuator," Journal of Modeling and Simulation of Micro-systems, Vol. 2, No.1 (2001), pp. 83-88.
M. Geradin and D. J. Rixen, Mechanical vibrations Theory and Application to Structural Dynamics. 1997 (Wiley), Second Edition.
M. A. Crisfield, Non-Linear Finite Element Analysis of Solids and Structures. 1991. John Wiley
T. Belytschko and T. Black, "Elastic Crack Growth in Finite Elements with Minimal Remeshing", International Journal of Numerical Methods in Engineering, Vol. 45(5) (1999), pp. 601-620.
N. Moes and J. Dolbow and T. Belytschko, "A Finite Element Method for Crack Growth without Remeshing", International Journal of Numerical Methods in Engineering, Vol. 46(1999), pp. 131-150
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