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Stiction failure in microswitches due to elasto-plastic adhesive contact
Wu, Ling; Golinval, Jean-Claude; Noels, Ludovic
2012In Proceedings of the XII SEM International Conference & Exposition on Experimental and Applied Mechanics
 

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Abstract :
[en] Undesirable stiction, which results from contact between surfaces, is a major failure mode in micro-switches. Indeed the adhesive forces can become so important that the two surfaces remain permanently glued, limiting the life-time of the MEMS. This is especially true when contact happens between surfaces where elasto-plastic asperities deform permanently until the surfaces reach plastic accommodation, increasing the surface forces. To predict this behavior, a micro adhesive-contact model is developed, which accounts for the surfaces topography evolutions during elasto-plastic contacts. This model can be used at a higher scale to study the MEMS behavior, and thus its life-time. The MEMS devices studied here are assumed to work in a dry environment. In these operating conditions only the Van der Waals forces have to be considered for adhesion. For illustration purpose, an electrostatic-structural analysis is performed on a micro-switch. To determine the degree of plasticity involved, the impact energy of the movable electrode at pull-in is estimated. Thus the maximal adhesive force is predicted using the developed model.
Disciplines :
Materials science & engineering
Mechanical engineering
Author, co-author :
Wu, Ling ;  Université de Liège - ULiège > Département d'aérospatiale et mécanique > LTAS - Vibrations et identification des structures
Golinval, Jean-Claude  ;  Université de Liège - ULiège > Département d'aérospatiale et mécanique > LTAS - Vibrations et identification des structures
Noels, Ludovic  ;  Université de Liège - ULiège > Département d'aérospatiale et mécanique > Computational & Multiscale Mechanics of Materials (CM3)
Language :
English
Title :
Stiction failure in microswitches due to elasto-plastic adhesive contact
Publication date :
2012
Event name :
XII SEM International Conference & Exposition on Experimental and Applied Mechanics
Event organizer :
Society for Experimental Mechanics Inc.
Event place :
Costa Mesa, United States
Event date :
11-14 June 2012
Audience :
International
Main work title :
Proceedings of the XII SEM International Conference & Exposition on Experimental and Applied Mechanics
Pages :
9 p.
Available on ORBi :
since 18 April 2012

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