Micro-usinage par laser excimère

Course notes (Learning materials)

Gailly, Patrick

2007

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https://hdl.handle.net/2268/116099

Cours laser excimer - général mars10.pdf

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Keywords :

excimer laser; micromachining

Disciplines :

Engineering, computing & technology: Multidisciplinary, general & others

Author, co-author :

Gailly, Patrick ; Université de Liège - ULiège > CSL (Centre Spatial de Liège)

Language :

French

Title :

Micro-usinage par laser excimère

Alternative titles :

[en] Excimer laser micromachining

Publication date :

November 2007

Available on ORBi :

since 05 April 2012

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100 (3 by ULiège)

Number of downloads

2 (2 by ULiège)