Reference : Micro-usinage par laser excimère
Learning materials : Course notes
Engineering, computing & technology : Multidisciplinary, general & others
http://hdl.handle.net/2268/116099
Micro-usinage par laser excimère
French
[en] Excimer laser micromachining
Gailly, Patrick mailto [Université de Liège - ULiège > > CSL (Centre Spatial de Liège) >]
Nov-2007
[en] excimer laser ; micromachining
http://hdl.handle.net/2268/116099

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Cours laser excimer - général mars10.pdfAuthor preprint6.94 MBRequest copy

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