Mechanical and tribological characterization of a thermally actuated MEMS cantilever

Pustan, Marius; Rochus, Véronique; Golinval, Jean-Claude

doi:10.1007/s00542-011-1423-7

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Mechanical and tribological characterization of a thermally actuated MEMS cantilever

Pustan, Marius; Rochus, Véronique; Golinval, Jean-Claude

2012 • In Microsystem Technologies

Peer Reviewed verified by ORBi

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https://hdl.handle.net/2268/111972

DOI
10.1007/s00542-011-1423-7

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Keywords :

Mechanical characterization; Electro-mechanical micro systems; tribological characterization

Abstract :

[en] The temperature effect on the mechanical and tribological behaviors of a microelectromechanical systems cantilever is experimentally investigated using an atomic force microscope. A nonlinear variation of the bending stiffness of microcantilevers as a function of temperature is determined. The variation of the adhesion force between the tip of atomic force microscope (AFM) probe (Si3N4) and the microcantilever fabricated in gold is monitored at different temperatures. Using the lateral mode operation of atomic force microscope, the influence of temperature on friction coefficient between the tip of AFM probe and microcantilever is presented. Finite element analysis is used to estimate the thermal field distribution in microcantilever and the axial expansion.

Disciplines :

Mechanical engineering

Author, co-author :

Pustan, Marius; Technical University of Cluj-Napoca

Rochus, Véronique; IMEC

Golinval, Jean-Claude ; Université de Liège - ULiège > Département d'aérospatiale et mécanique > LTAS - Vibrations et identification des structures

Language :

English

Title :

Mechanical and tribological characterization of a thermally actuated MEMS cantilever

Publication date :

2012

Journal title :

Microsystem Technologies

ISSN :

0946-7076

eISSN :

1432-1858

Publisher :

Springer Science & Business Media B.V.

Peer reviewed :

Peer Reviewed verified by ORBi

Available on ORBi :

since 15 February 2012

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