Computer software; Data analysis; Simulation; Ion beam analysis; Porous materials
Abstract :
[en] The additional energy spread due to sample porosity was implemented in the SIMNRA simulation code, version 6.60 and higher. Deviations of the path length and energy loss distributions from the ones expected from a Poisson distribution of the number of traversed pores are taken into account. These deviations are due to the interaction of pores at higher pore concentrations by overlap or blocking. The skewnesses of the energy distributions are approximated by two-piece normal distributions with identical first three moments. Propagation of porosity-induced energy spread in thick layers is taken into account. Calculated results are compared to experimental data obtained with thin TiO2 mesoporous films measured by Rutherford backscattering (RBS),transmission electron microscopy (TEM), and atmospheric poroellipsometry.
Disciplines :
Chemistry
Author, co-author :
Mayer, Matej; Max-Planck-Institut für Plasmaphysik
von Toussaint, Udo; Max-Planck-Institut für Plasmaphysik
Dewalque, Jennifer ; Université de Liège - ULiège > Département de chimie (sciences) > LCIS - GreenMAT
Dubreuil, Olivier
Henrist, Catherine ; Université de Liège - ULiège > Département de chimie (sciences) > LCIS - GreenMAT
Cloots, Rudi ; Université de Liège - ULiège > Département de chimie (sciences) > LCIS - GreenMAT
Mathis, François ; Université de Liège - ULiège > Centre européen en archéométrie
Language :
English
Title :
Rutherford backscattering analysis of porous thin TiO2 films
Publication date :
February 2012
Journal title :
Nuclear Instruments and Methods in Physics Research. Section B, Beam Interactions with Materials and Atoms
ISSN :
0168-583X
eISSN :
1872-9584
Publisher :
Elsevier Science, Amsterdam, Netherlands
Special issue title :
20th International Conference on Ion Beam Analysis
