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Heavy boron doping of epitaxial Si for TFET application : Non selective deposition
Nguyen, Ngoc Duy
2009
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https://hdl.handle.net/2268/98543
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Keywords :
Heavy doping; Boron doping; Non-selective epitaxial growth
Disciplines :
Materials science & engineering
Author, co-author :
Nguyen, Ngoc Duy
;
Université de Liège - ULiège > Département de physique > Physique des solides, interfaces et nanostructures
Language :
English
Title :
Heavy boron doping of epitaxial Si for TFET application : Non selective deposition
Publication date :
2009
Report number :
PR07.0390
Available on ORBi :
since 09 September 2011
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