Heavy n-type doping of SiGe for SIMS calibration

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Internal report (Reports)

Nguyen, Ngoc Duy

2007

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https://hdl.handle.net/2268/98537

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Keywords :

Heavy n-type doping; SiGe; CVD

Disciplines :

Materials science & engineering

Author, co-author :

Language :

English

Title :

Heavy n-type doping of SiGe for SIMS calibration

Publication date :

2007

Report number :

PR06.0496

Available on ORBi :

since 09 September 2011

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