Development of a metrology and figuring machine for large X-ray mirror

To improve the image quality of X-ray replicated mirror, A new metrology machine has been built link to a ion beam figuring machine.
The first one allows to accurately measure the shape of replicated X-ray mirrors. The machine is dedicated to cylindrical mirrors shape whose dimensions can vary from 50 to 800 mm in height and 600 to 800 mm in diameter. The present contribution will sum up the results achieved with this machine on an actual mirror. The machine calibration results and the data analysis to obtain the mirror final shape will be detailed. The final results are compared with other measurements performed by a traditional 3-D machine.
The second one is a dedicated ion figuring machine dedicated for the figuring of the X-ray mirrors. The preliminary tests were undertaken to evaluate the ion figuring process on Nickel replicated surfaces. Those results were used to improve the design of the figuring machine, a detailed description of that machine follows. The reliability of the ion figuring process is shown through an actual problem. Finally, some leading remarks about the improvements of the ion figuring ion machine and the ion figuring process in general are drawn.