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Article (Scientific journals)
Mechanical properties of Al/Al2O3 nanolaminated films: correlation to microstructure
Ben Daia, M.; Aubert, P.; Labdi, S. et al.
2000 • In Surface and Coatings Technology, 125 (1-3), p. 196-200
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https://hdl.handle.net/2268/88138
DOI
10.1016/S0257-8972(99)00545-9
 

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Keywords :
Al/Al2O3 multilayers; Nanoindentation; Tribological properties
Abstract :
[en] Wear resistance and the hardness of Al/Al2O3 nanolaminated films were investigated in this study. Monolithic films and multilayers were deposited on a silicon substrate with two different substrate temperatures: T-s= 25 degrees C and T-s= -90 degrees C. The period thickness of multilayers was lowering from 40 to 2 nm. From nanoindentation measurements, it appears that the hardness of multilayers has an intermediate value between those of metal (Al) and ceramic (Al2O3). The tribological test was conducted by the pin-on-disc method. The T-s=25 degrees C deposited multilayers, as well as single films, demonstrated poor wear resistance. The best wear resistance was obtained for multilayers deposited at the lowest substrate temperature (T-s= -90 degrees C). The results are ill good agreement with structural characterization. X-ray reflectometry demonstrated that the multilayer character of Al/Al2O3 is more pronounced for T-s= -90 degrees C. (C) 2000 Elsevier Science S.A. All rights reserved.
Disciplines :
Mechanical engineering
Author, co-author :
Ben Daia, M.;  Laboratoire Multicouches Nanométriques (LMN), Université d’Evry, Bd F. Mitterand, 91023 Evry cedex, France
Aubert, P.;  Laboratoire Multicouches Nanométriques (LMN), Université d’Evry, Bd F. Mitterand, 91023 Evry cedex, France
Labdi, S.;  Laboratoire Multicouches Nanométriques (LMN), Université d’Evry, Bd F. Mitterand, 91023 Evry cedex, France
Le Paven-Thivet, C.;  Laboratoire Multicouches Nanométriques (LMN), Université d’Evry, Bd F. Mitterand, 91023 Evry cedex, France
Houdy, P.;  Laboratoire Multicouches Nanométriques (LMN), Université d’Evry, Bd F. Mitterand, 91023 Evry cedex, France
Bozet, Jean-Luc ;  Université de Liège - ULiège > Département de chimie appliquée > Chimie appliquée - Cryotribologie
Language :
English
Title :
Mechanical properties of Al/Al2O3 nanolaminated films: correlation to microstructure
Publication date :
2000
Journal title :
Surface and Coatings Technology
ISSN :
0257-8972
eISSN :
1879-3347
Publisher :
Elsevier Science, Lausanne, Switzerland
Volume :
125
Issue :
1-3
Pages :
196-200
Peer reviewed :
Peer Reviewed verified by ORBi
Available on ORBi :
since 01 April 2011

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