[en] The nanomechanical material behaviour of a gold microcantilever subjected to plastic deformations is presented in this paper. Using an atomic force microscope, experimental investigations are performed in order to determine the dependence between bending deflections of sample versus applied forces and to estimate the maximum stress in the beam structure. During testing, the force has successive positions on microcantilever, starting from the beam free-end and moving toward to the anchor. The plastic deformation of microcantilever occurs when the force is applied close to the beam anchor and performed large deflections. Finite element analysis is used to visualize the deflection of microcantilever and to estimate the maximum stress.
Research Center/Unit :
LTAS, Département d'Aérospatiale & Mécanique, University of Liège
Disciplines :
Materials science & engineering
Author, co-author :
Pustan, Marius ; Université de Liège - ULiège > Département d'aérospatiale et mécanique > LTAS - Vibrations et identification des structures
Language :
English
Title :
NANOMATERIAL BEHAVIOUR OF A GOLD MICROCANTILEVER SUBJECTED TO PLASTIC DEFORMATIONS
M. Pustan, V. Rochus, J-C Golinval, presented at the IEEE Conference on Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro/Nanoelectronics and Systems EuroSimE, 2010, Bordeaux, France.
N. Lobontiu, E. Garcia, Mechanics of Microelectromechanical Systems, Cornell University Ithaca, New York (2004).
M. Pustan, Z. Rymuza, Mechanical and Tribological Characterizations of MEMS Structures, Risoprint, Cluj Napoca (2007).
M. Pustan, Z. Rymuza, J. Micromech. Microeng. 17, 1611 (2007).
B. Bhushan (Ed), Handbook of Nanotribology and Nanomechanics - An Introduction, Springer Verlag, Berlin (2005).
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