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Reactive DC magnetron sputtering deposition of titanium oxide nanoparticles : influence of the process parameters on the morphology and the surface coverage
Dreesen, Laurent; Cecchet, Francesca; Lucas, Stéphane
2008 • 14 International Congress on Thin Films
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https://hdl.handle.net/2268/76795
 

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Disciplines :
Physics
Author, co-author :
Dreesen, Laurent ;  Université de Liège - ULiège > Département de physique > Biophotonique
Cecchet, Francesca;  Facultés Universitaires Notre-Dame de la Paix - Namur - FUNDP
Lucas, Stéphane;  Facultés Universitaires Notre-Dame de la Paix - Namur - FUNDP
Language :
English
Title :
Reactive DC magnetron sputtering deposition of titanium oxide nanoparticles : influence of the process parameters on the morphology and the surface coverage
Publication date :
October 2008
Event name :
14 International Congress on Thin Films
Event place :
Gand, Belgium
Event date :
Octobre 2008
Audience :
International
Available on ORBi :
since 24 November 2010

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