SiGe tunnel field effect transistors: challenges for selective epitaxial growth

Loo, Roger; Iacopi, Francesca; Vanherle, Wendy; Rooyackers, Rita; Vandooren, Anne; Takeuchi, Shotaro; Nguyen, Ngoc Duy; Doornbos, Gernd; De Gendt, Stefan

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SiGe tunnel field effect transistors: challenges for selective epitaxial growth

Loo, Roger; Iacopi, Francesca; Vanherle, Wendy et al.

2009 • MRS Spring Meeting, 2009

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https://hdl.handle.net/2268/69196

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Keywords :

SiGe; Tunnel FET; Selective epitaxial growth

Disciplines :

Materials science & engineering

Author, co-author :

Loo, Roger; IMEC

Iacopi, Francesca; IMEC

Vanherle, Wendy; IMEC

Rooyackers, Rita; IMEC

Vandooren, Anne; IMEC

Takeuchi, Shotaro; IMEC

Nguyen, Ngoc Duy ; IMEC

Doornbos, Gernd; IMEC

De Gendt, Stefan; Katholieke Universiteit Leuven - KUL and IMEC

Language :

English

Title :

SiGe tunnel field effect transistors: challenges for selective epitaxial growth

Publication date :

2009

Event name :

MRS Spring Meeting, 2009

Event organizer :

MRS

Event place :

San Francisco, United States

Event date :

13-17/4/2009

Audience :

International

Available on ORBi :

since 16 August 2010

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