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Unpublished conference/Abstract (Scientific congresses and symposiums)
SiGe tunnel field effect transistors: challenges for selective epitaxial growth
Loo, Roger
;
Iacopi, Francesca
;
Vanherle, Wendy
et al.
2009
•
MRS Spring Meeting, 2009
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https://hdl.handle.net/2268/69196
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Keywords :
SiGe; Tunnel FET; Selective epitaxial growth
Disciplines :
Materials science & engineering
Author, co-author :
Loo, Roger;
IMEC
Iacopi, Francesca;
IMEC
Vanherle, Wendy;
IMEC
Rooyackers, Rita;
IMEC
Vandooren, Anne;
IMEC
Takeuchi, Shotaro;
IMEC
Nguyen, Ngoc Duy
;
IMEC
Doornbos, Gernd;
IMEC
De Gendt, Stefan;
Katholieke Universiteit Leuven - KUL and IMEC
Language :
English
Title :
SiGe tunnel field effect transistors: challenges for selective epitaxial growth
Publication date :
2009
Event name :
MRS Spring Meeting, 2009
Event organizer :
MRS
Event place :
San Francisco, United States
Event date :
13-17/4/2009
Audience :
International
Available on ORBi :
since 16 August 2010
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