[en] In this letter we present a method to increase the efficiency of SiGe layer relaxation by He+ ion implantation and annealing. Preferential nucleation of He platelets along a -impurity layer grown in the Si substrate below the SiGe layer results in planar localization and homogenization of dislocation loop sources inducing a more uniform distribution of misfit dislocations. We demonstrate this for a thin Si:C layer grown by reduced pressure chemical vapor deposition. The optimization of the conditions for efficient relaxation and layer quality is studied with respect to the position of the Si:C layer and the process parameters. Relaxation degrees up to 85% are obtained for Si0.77Ge0.23 layers.
Disciplines :
Electrical & electronics engineering
Author, co-author :
Buca, D.; Research Center Jülich > Institute of Bio- and Nanosystems and JARA—Fundamentals of Future Information Technology
Minamisawa, R. A.; Research Center Jülich > Institute of Bio- and Nanosystems and JARA—Fundamentals of Future Information Technology
Trinkaus, H.; Research Center Jülich > Institute of Bio- and Nanosystems and JARA—Fundamentals of Future Information Technology
Holländer, B.; Research Center Jülich > Institute of Bio- and Nanosystems and JARA—Fundamentals of Future Information Technology
scite shows how a scientific paper has been cited by providing the context of the citation, a classification describing whether it supports, mentions, or contrasts the cited claim, and a label indicating in which section the citation was made.
Bibliography
Y. J. Mii, H. Y. Xie, E. A. Fitzgerald, D. Monroe, F. A. Thiel, B. E. Weir, and L. C. Feldman, Appl. Phys. Lett. 0003-6951 59, 1611 (1991). 10.1063/1.106246
E. Fitzgerald, Y. -H. Xie, M. Green, D. Brasen, A. Kortan, J. Michel, Y. -J. Mii, and B. Weir, Appl. Phys. Lett. 0003-6951 59, 811 (1991). 10.1063/1.105351
C. Mazure and A. -J. Auberton-Herv́, Proceedings of the 31st European Solid-State Circuits Conference (ESSCIRC 2005), Grenoble, France (IEEE, Piscataway, NJ, 2005), p. 29.
M. Reiche, C. Himcinschi, U. Gösele, S. Christiansen, S. Mantl, D. Buca, Q. T. Zhao, S. Feste, R. Loo, D. Nguyen, W. Buchholtz, A. Wei, M. Horstmann, D. Feijoo, and P. Storck, ECS Trans. 1938-5862 6, 339 (2007). 10.1149/1.2728880
D. Buca, S. F. Feste, B. Holländer, S. Mantl, R. Loo, M. Caymax, R. Carius, and H. Schaefer, Solid-State Electron. 0038-1101 50, 32 (2006). 10.1016/j.sse.2005.10.042 (Pubitemid 43065254)
D. Buca, B. Holländer, S. Feste, St. Lenk, H. Trinkaus, S. Mantl, R. Loo, and M. Caymax, Appl. Phys. Lett. 0003-6951 90, 032108 (2007). 10.1063/1.2431702 (Pubitemid 46146358)
H. Trinkaus, B. Holländer, S. Rongen, S. Mantl, H. -J. Herzog, J. Kuchenbecker, and T. Hackbarth, Appl. Phys. Lett. 0003-6951 76, 3552 (2000). 10.1063/1.126704
J. Chen, P. Jung, and H. Trinkaus, Phys. Rev. B 0163-1829 61, 12923 (2000). 10.1103/PhysRevB.61.12923
N. Hueging, M. Luysberg, H. Trinkaus, K. Tillmann, and K. Urban, J. Mater. Sci. 0022-2461 41, 4454 (2006). 10.1007/s10853-006-0153-1 (Pubitemid 44226126)
D. D'Angelo, S. Mirabella, E. Bruno, A. Terrasi, C. Bongiorno, F. Giannazzo, V. Raineri, G. Bisognin, and M. Berti, J. Appl. Phys. 0021-8979 103, 016104 (2008). 10.1063/1.2826994
V. M. Vishnyakov, S. E. Donnelly, and G. Carter, J. Appl. Phys. 0021-8979 94, 238 (2003). 10.1063/1.1576493
D. D'Angelo, S. Mirabella, E. Bruno, G. Pulvirenti, A. Terrasi, G. Bisognin, M. Berti, C. Bongiorno, and V. Raineri, J. Appl. Phys. 0021-8979 104, 023501 (2008). 10.1063/1.2955707
A. D. Brailsford and R. Bullough, Philos. Trans. R. Soc. London, Ser. A 0962-8428 302, 87 (1981). 10.1098/rsta.1981.0158
D. Buca, M. J. Mörschbächer, B. Holländer, M. Luysberg, R. Loo, M. Caymax, and S. Mantl, Mater. Res. Soc. Symp. Proc. 0272-9172 809, 15 (2004).
J. F. Ziegler, J. P. Biersack, and U. Littmark, The Stopping Range of Ions in Solids (SRIM-The Stopping and Range of Ions in Matter) (Pergamon, New York, 1985), http://www.srim.org/.
V. Raineri, P. Fallica, G. Percolla, A. Battaglia, M. Barbagallo, and S. Campisano, J. Appl. Phys. 0021-8979 78, 3727 (1995). 10.1063/1.359953
This website uses cookies to improve user experience. Read more
Save & Close
Accept all
Decline all
Show detailsHide details
Cookie declaration
About cookies
Strictly necessary
Performance
Strictly necessary cookies allow core website functionality such as user login and account management. The website cannot be used properly without strictly necessary cookies.
This cookie is used by Cookie-Script.com service to remember visitor cookie consent preferences. It is necessary for Cookie-Script.com cookie banner to work properly.
Performance cookies are used to see how visitors use the website, eg. analytics cookies. Those cookies cannot be used to directly identify a certain visitor.
Used to store the attribution information, the referrer initially used to visit the website
Cookies are small text files that are placed on your computer by websites that you visit. Websites use cookies to help users navigate efficiently and perform certain functions. Cookies that are required for the website to operate properly are allowed to be set without your permission. All other cookies need to be approved before they can be set in the browser.
You can change your consent to cookie usage at any time on our Privacy Policy page.
