Reference : In-line characterization of heterojunction bipolar transistor base layers by high-res...
Scientific congresses and symposiums : Poster
Engineering, computing & technology : Electrical & electronics engineering
http://hdl.handle.net/2268/68677
In-line characterization of heterojunction bipolar transistor base layers by high-resolution x-ray diffraction
English
Nguyen, Ngoc Duy mailto [IMEC > > > >]
Loo, R. [IMEC > > > >]
Hikavyy, A. [IMEC > > > >]
Van Daele, B. [IMEC > > > >]
Ryan, P. [Bede plc > > > >]
Wormington, M. [Bede plc > > > >]
Hopkins, J. [Bede plc > > > >]
2007
No
International
3rd International Workshop on New Group IV Semiconductor Nanoelectronics
8-9/11/2007
Tohoku University
Sendai
Japan
In-line characterization; Heterojunction; Bipolar transistor; HRXRD
http://hdl.handle.net/2268/68677

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