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Poster (Scientific congresses and symposiums)
In-line characterization of heterojunction bipolar transistor base layers by high-resolution x-ray diffraction
Nguyen, Ngoc Duy; Loo, R.; Hikavyy, A. et al.
20073rd International Workshop on New Group IV Semiconductor Nanoelectronics
 

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Keywords :
In-line characterization; Heterojunction; Bipolar transistor; HRXRD
Disciplines :
Electrical & electronics engineering
Author, co-author :
Nguyen, Ngoc Duy  ;  IMEC
Loo, R.;  IMEC
Hikavyy, A.;  IMEC
Van Daele, B.;  IMEC
Ryan, P.;  Bede plc
Wormington, M.;  Bede plc
Hopkins, J.;  Bede plc
Language :
English
Title :
In-line characterization of heterojunction bipolar transistor base layers by high-resolution x-ray diffraction
Publication date :
2007
Event name :
3rd International Workshop on New Group IV Semiconductor Nanoelectronics
Event organizer :
Tohoku University
Event place :
Sendai, Japan
Event date :
8-9/11/2007
Audience :
International
Available on ORBi :
since 12 August 2010

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