Reference : Modelling of the squeeze film air damping in MEMS
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Modelling of the squeeze film air damping in MEMS
Bruls, Olivier mailto [Université de Liège - ULiège > Département d'aérospatiale et mécanique > Laboratoire des Systèmes Multicorps et Mécatroniques >]
University of Liège
Internal Report, LTAS - Vibrations et Identification des Structures
[en] Modelling ; squeeze film air damping ; MEMS
[en] This document proposes a formulation of the squeeze film air damping in micro-plates. The nonlinear Reynolds equation for compressible film is used to analyze the air pressure field, whereas a standard linear elastic model is used for the displacement field. The formulation is based on a finite element discretization of both the pressure and displacement fields. The coupled equations of motion are established and, for harmonic oscillations, we show that the resulting damping matrix depends on the frequency.
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