[en] Quantitative Accelerated Life Testing (QALT) is a solution for assessing the
reliability of Micro Electro Mechanical Systems (MEMS). A procedure for QALT is shown
in this paper and an attempt to assess the reliability level for a batch of MEMS
accelerometers is reported. The testing plan is application-driven and contains combined
tests: thermal (high temperature) and mechanical stress. Two variants of mechanical stress
are used: vibration (at a fixed frequency) and tilting. Original equipment for testing at tilting
and high temperature is used. Tilting is appropriate as application-driven stress, because the
tilt movement is a natural environment for devices used for automotive and aerospace
applications. Also, tilting is used by MEMS accelerometers for anti-theft systems. The test
results demonstrated the excellent reliability of the studied devices, the failure rate in the
“worst case” being smaller than 10-7h-1.
Disciplines :
Physical, chemical, mathematical & earth Sciences: Multidisciplinary, general & others
Author, co-author :
Bazu, Marius; IMT- Bucharest > National Institute for R&D in Microtechnologies
Gălăţeanu, Lucian; IMT - Bucharest > National Institute for R&D in Microtechnologies
Ilian, Virgil Emil; IMT - Bucharest > National Institute for R&D in Microtechnologies
Loicq, Jerôme ; Université de Liège - ULiège > CSL (Centre Spatial de Liège)
Habraken, Serge ; Université de Liège - ULiège > Département de physique > Optique - Hololab - CSL (Centre Spatial de Liège)
Collette, Jean-Paul ; Université de Liège - ULiège > CSL (Centre Spatial de Liège)
Language :
English
Title :
Quantitative accelerated life testing of MEMS accelerometers
Publication date :
2007
Journal title :
Sensors
ISSN :
1424-8220
eISSN :
1424-3210
Publisher :
Multidisciplinary Digital Publishing Institute (MDPI), Switzerland
scite shows how a scientific paper has been cited by providing the context of the citation, a classification describing whether it supports, mentions, or contrasts the cited claim, and a label indicating in which section the citation was made.
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